Prediction of Vacuum Pump Degradation in Semiconductor Processing

Prediction of Vacuum Pump Degradation in Semiconductor Processing

This paper addresses the issue of vacuum pump degradation in semiconductor manufacturing. The ability to identify the current level of vacuum pump degradation and predict the Remaining-Useful-Life (RUL) of a dry vacuum pump would allow manufacturers to schedule pump swaps at convenient times, and reduce the instances of unexpected pump failures, which can incur significant costs. In this paper,...

prediction of ignition delay period in d.i diesel engines

a semi-empirical mathematical model for predicting physical part of ignition delay period in the combustion of direct - injection diesel engines with swirl is developed . this model based on a single droplet evaporation model . the governing equations , namely , equations of droplet motion , heat and mass transfer were solved simultaneously using a rung-kutta step by step unmerical method . the...

Vacuum Gauge to Vacuum Pump Valve

Study nanostructures of semiconductor zinc oxide (ZnO) as a photocatalyst for the degradation of organic pollutants

In the present study, comparison of  photocatalytic activity of nanostructures semiconductor zinc oxide (ZnO) was prepared using the different methods on the degradation of organic dye such as methylene blue that was investigated. Previous studies have proved that such semiconductors can degrade most kinds of persistent organic pollutants, such as detergents, dyes, pesticides and volatile organ...

Study nanostructures of semiconductor zinc oxide (ZnO) as a photocatalyst for the degradation of organic pollutants

In the present study, comparison of  photocatalytic activity of nanostructures semiconductor zinc oxide (ZnO) was prepared using the different methods on the degradation of organic dye such as methylene blue that was investigated. Previous studies have proved that such semiconductors can degrade most kinds of persistent organic pollutants, such as detergents, dyes, pesticides and volatile organ...